Introduction to MEMS & MST. Scaling Laws and demand in miniaturization. Working principles of Micro Sensors, Actuators and applications in real systems. Microsystems mechanisms & precision using flexures, design considerations, modeling and innovations. Materials selection, Micro Fabrication. Microfluidics, Chemical Sensors, Biomedical & Bio-MEMS, and Lab-on-a-chip. System Integration and Packaging.
Recommended Books:
- Tai-Ran Hsu, “MEMS & MICROSYSTEMS Design and Manufacture”, Tata McGraw Hill Education Pvt. Ltd.
- Marc Madou, “Fundamentals of Microfabrication: The Science of Miniaturization”, Vol. I, II, & III, CRC Press. 2012
- Stephen D. Senturia, “Microsystems Design”, Springer, 2006.
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