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Introduction: Basic definition, Size scales, Scaling analysis, Technology change, Lithographic Processes- Optical and X-ray; Precision Engineering And Practices: Sources of Error, Machine Tool Variables- accuracy, stiffness, spindle vibration, flatness, straightness and smoothness of motion, Feedback Variables, Cutting Tool Variables, Workpiece Variables, Environment Effects and Thermal Errors; Introduction To Machining Analysis: Geometry of Cutting Edge, Energy Models, Comparison with Micro-scale Machining; Diamond Micromachining: Introduction, Diamond as a Tool Material, Compatible Materials, Diamond Machining, Micro-mechanical Applications, Ductile Regime Grinding; Focused ion beam based Micro-/Nano-fabrication; Micro-ECM, Micro-EDM etc: Parameter dependencies, Case studies; Micro-milling: Process and applications, micro-mechanically milled X-ray masks, Mask Absorption Quantification, Exposure Quantification; Micro-drilling: Micro-drilling and Macro-drilling Techniques; Laser Micromachining: laser Optics, Laser Ablation, Heat Affected Zone and Laser Polymerisation. LIGA, S-LIGA Micro Welding: Micro welding in similar and dissimilar materials; Micro Casting: Casting processes like vacuum, Semi-solid state, Applications; Processing of Integrated Circuits, Clean rooms, crystal growing and shaping of wafers, Etching, Photo and other lithography techniques, CVD, Metallisation etc.; Micro Forming: Bulk Forming, Forming of Micro-sheet Metal Components; Micro Assembly: Mechanical Assembly, Self-assembly of Micro-parts; Handling for Micro-manufacturing, Robotics in Micro-manufacturing and Micro-robotics; and Measurement, Testing, and Diagnosis for Micro-manufacturing Systems |
Text/Reference Books:
- Micromanufacturing Processes By V.K. Jain, CRC Press, 2012.
- Micromanufacturing Engineering and Technology By Yi Qin, Elsevier, 2000.
- Precision Micromanufacturing Process Web Tutorial: By Hongdi Zhang
- Micro-Manufacturing: Design and Manufacturing of Micro-Products by Muammer Koc, Tugrul Ozel, Wiley, 2011
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